{"id":6099,"date":"2010-09-17T00:00:00","date_gmt":"2010-09-16T15:00:00","guid":{"rendered":"http:\/\/www.waseda.jp\/news\/6099"},"modified":"2014-10-22T14:59:05","modified_gmt":"2014-10-22T05:59:05","slug":"6099","status":"publish","type":"post","link":"https:\/\/www.waseda.jp\/top\/news\/6099","title":{"rendered":"Si\u30ca\u30ce\u30ef\u30a4\u30e4\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3067\u9ad8\u99c6\u52d5\u529b\u3068\u4f4e\u3044\u5f85\u6a5f\u96fb\u529b\u3092\u5b9f\u73fe \u30ca\u30ce\u7406\u5de5\u5b66\u7814\u7a76\u6a5f\u69cb\u3001\u6771\u4eac\u5de5\u696d\u5927\u5b66\u3068\u5171\u540c\u7814\u7a76"},"content":{"rendered":"<p>\u6771\u4eac\u5de5\u696d\u5927\u5b66\u306e\u5ca9\u4e95\u6d0b\u6559\u6388\u306f\u65e9\u7a32\u7530\u5927\u5b66\u30ca\u30ce\u7406\u5de5\u5b66\u7814\u7a76\u6a5f\u69cb\u306e\u5927\u6bdb\u5229\u5065\u6cbb\u5ba2\u54e1\u51c6\u6559\u6388\u3001\u5c71\u7530\u5553\u4f5c\u5ba2\u54e1\u4e0a\u7d1a\u7814\u7a76\u54e1\u3089\u3068\u5171\u540c\u3067\u3001\u4f4e\u3044\u5f85\u6a5f\u30ea\u30fc\u30af\u96fb\u6d41\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u3082\u9ad8\u3044\u99c6\u52d5\u529b\u3092\u793a\u3059\u30b7\u30ea\u30b3\u30f3(Si)\u30ca\u30ce\u30ef\u30a4\u30e4\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u8a66\u4f5c\u306b\u6210\u529f\u3057\u305f\u3002Si\u30ca\u30ce\u30ef\u30a4\u30e4\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306f\u3001\u5c06\u6765\u5fc5\u9808\u3068\u306a\u308b\u6975\u3081\u3066\u7701\u30a8\u30cd\u3067\u304b\u3064\u9ad8\u6027\u80fd\u3092\u4e21\u7acb\u3057\u305fLSI\u306e\u5b9f\u73fe\u306b\u5411\u3051\u3066\u69d8\u3005\u306a\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u69cb\u9020\u304c\u691c\u8a0e\u3055\u308c\u3066\u4e2d\u3067\u300116nm\u4e16\u4ee3\u3088\u308a\u5148\u306e\u4e16\u4ee3\u3067\u91cf\u7523\u5bb9\u6613\u6027\u3068\u9ad8\u5bc6\u5ea6\u96c6\u7a4d\u6027\u306e\u89b3\u70b9\u304b\u3089\u73fe\u72b6\u306e\u30d7\u30ec\u30fc\u30ca\u30fc\u578b\u306e\u30c7\u30d0\u30a4\u30b9\u3092\u7f6e\u304d\u63db\u3048\u308b\u6700\u6709\u529b\u5019\u88dc\u306b\u306a\u308b\u3068\u671f\u5f85\u3055\u308c\u308b\u3002<\/p>\n<p>\u958b\u767a\u3057\u305f\u306e\u306f\u30b2\u30fc\u30c8\u30bb\u30df\u30a2\u30e9\u30a6\u30f3\u30c9\u578b\u306eSi\u30ca\u30ce\u30ef\u30a4\u30e4\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3067\u3001\u73fe\u5728CMOS\u96c6\u7a4d\u56de\u8def\u306b\u7528\u3044\u3089\u308c\u3066\u3044\u308b\u6c4e\u7528\u306e\u534a\u5c0e\u4f53\u5fae\u7d30\u52a0\u5de5\u6280\u8853\u3092\u5229\u7528\u3057\u3066\u4f5c\u88fd\u3092\u884c\u3046\u3053\u3068\u304c\u53ef\u80fd\u3067\u3042\u308b\u3002\u69d8\u3005\u306a\u30ef\u30a4\u30e4\u65ad\u9762\u5f62\u72b6\u306e\u96fb\u6c17\u7279\u6027\u8a55\u4fa1\u3092\u884c\u3063\u305f\u3068\u3053\u308d\u3001\u30ef\u30a4\u30e4\u306e\u65ad\u9762\u304c12nm\u00d719nm\uff08\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\uff09\u3067\u30b2\u30fc\u30c8\u957765nm\u3001\u30b2\u30fc\u30c8\u7d76\u7e01\u819c3nm\u3067\u30ef\u30a4\u30e41\u672c\u3042\u305f\u308a60\u03bcA\uff08\u30de\u30a4\u30af\u30ed\u30a2\u30f3\u30da\u30a2\uff09\u3068\u6975\u3081\u3066\u9ad8\u3044\u96fb\u6d41\u5024\u3092\u5f97\u305f\u3002\u30ea\u30fc\u30af\u96fb\u6d41\u3082\u30ef\u30a4\u30e41\u672c\u3042\u305f\u308a1nA\u3068\u6975\u3081\u3066\u4f4e\u304f\u3001\u30aa\u30f3\/\u30aa\u30d5\u6bd4\u30676\u00d7104\u3092\u9054\u6210\u3057\u305f\u3002\u307e\u305f\u30c1\u30e3\u30cd\u30eb\u5468\u56f2\u898f\u683c\u5316\u306b\u304a\u3044\u3066\u306f1\u03bcm\uff08\u30de\u30a4\u30af\u30ed\u30e1\u30fc\u30c8\u30eb\uff09\u5f53\u305f\u308a1600\u03bcA\u306e\u30aa\u30f3\u96fb\u6d41\u3092\u5f97\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u305f\u3002<\/p>\n<p>\u4f4e\u70ad\u7d20\u793e\u4f1a\u5b9f\u73fe\u306e\u70ba\u306e\u7701\u30a8\u30cd\u578bMOS\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u5b9f\u73fe\u306e\u70ba\u306b\u306f\u30b2\u30fc\u30c8\u96fb\u6975\u3067\u30c1\u30e3\u30cd\u30eb\u3092\u53d6\u308a\u56f2\u3080\u30b2\u30fc\u30c8\u30bb\u30df\u30a2\u30e9\u30a6\u30f3\u30c9\u578b\u3092\u7528\u3044\u30aa\u30d5\u96fb\u6d41\u3092\u5236\u5fa1\u3059\u308b\u3053\u3068\u304c\u5fc5\u9808\u3067\u308b\u3002Si\u30ca\u30ce\u30ef\u30a4\u30e4\u306e\u3088\u3046\u306b\u30c1\u30e3\u30cd\u30eb\u90e8\u304cnm\u306e\u30b5\u30a4\u30ba\u3067\u306f\u96fb\u6d41\u304c\u52a3\u5316\u3059\u308b\u61f8\u5ff5\u304c\u3042\u3063\u305f\u304c\u3001\u672c\u6210\u679c\u306b\u3088\u308a\u3053\u306e\u61f8\u5ff5\u304c\u53d6\u308a\u6255\u308f\u308c\u305f\u3053\u3068\u306b\u306a\u308b\u3002\u4eca\u56de\u306f65nm\u30b2\u30fc\u30c8\u9577\u3067\u306e\u7d50\u679c\u3067\u3042\u308b\u304c\u3001\u66f4\u306a\u308b\u5fae\u7d30\u5316\u306b\u3088\u308a\u66f4\u306a\u308b\u4f4e\u6d88\u8cbb\u96fb\u96fb\u529b\u5316\u304c\u671f\u5f85\u3067\u304d\u308b\u3002<\/p>\n<p>\u672c\u6210\u679c\u306f\u30b9\u30da\u30a4\u30f3\u306e\u30bb\u30d3\u30ea\u30a2\u3067\u958b\u50ac\u3055\u308c\u308b\u534a\u5c0e\u4f53\u306e\u56fd\u969b\u4f1a\u8b70\u300cESSDERC\uff08European Solid-State Device Research Conference\uff09\u300d\u30679\u670816\u65e5\u306b\u767a\u8868\u3059\u308b\u3002\u672c\u7814\u7a76\u306fNEDO\u300c\u30ca\u30ce\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u534a\u5c0e\u4f53\u65b0\u6750\u6599\u30fb\u65b0\u69cb\u9020\u30ca\u30ce\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u6280\u8853\u958b\u767a\uff0f\u30ca\u30ce\u30ef\u30a4\u30e4FET\u306e\u7814\u7a76\u958b\u767a\u300d\u306e\u30d7\u30ed\u30b0\u30e9\u30e0\u3067\u5b9f\u65bd\u3055\u308c\u305f\u3002<\/p>\n<p>&nbsp;<\/p>\n<p><b>\u6771\u4eac\u5de5\u696d\u5927\u5b66\u767a\u8868\u8cc7\u6599<\/b><\/p>\n<p><a href=\"http:\/\/www.titech.ac.jp\/file\/100916_iwai.pdf\" target=\"_blank\">http:\/\/www.titech.ac.jp\/file\/100916_iwai.pdf<\/a><\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p>\u4ee5\u3000\u4e0a<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u6771\u4eac\u5de5\u696d\u5927\u5b66\u306e\u5ca9\u4e95\u6d0b\u6559\u6388\u306f\u65e9\u7a32\u7530\u5927\u5b66\u30ca\u30ce\u7406\u5de5\u5b66\u7814\u7a76\u6a5f\u69cb\u306e\u5927\u6bdb\u5229\u5065\u6cbb\u5ba2\u54e1\u51c6\u6559\u6388\u3001\u5c71\u7530\u5553\u4f5c\u5ba2\u54e1\u4e0a\u7d1a\u7814\u7a76\u54e1\u3089\u3068\u5171\u540c\u3067\u3001\u4f4e\u3044\u5f85\u6a5f\u30ea\u30fc\u30af\u96fb\u6d41\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u3082\u9ad8\u3044\u99c6\u52d5\u529b\u3092\u793a\u3059\u30b7\u30ea\u30b3\u30f3(Si)\u30ca\u30ce\u30ef\u30a4\u30e4\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u8a66\u4f5c\u306b\u6210\u529f\u3057\u305f\u3002S [&hellip;]<\/p>\n","protected":false},"author":2,"featured_media":6566,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[1],"tags":[186,57,5],"class_list":["post-6099","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news","tag-tech","tag-green","tag-research","lang-ja"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.waseda.jp\/top\/wp-json\/wp\/v2\/posts\/6099","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.waseda.jp\/top\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.waseda.jp\/top\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.waseda.jp\/top\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.waseda.jp\/top\/wp-json\/wp\/v2\/comments?post=6099"}],"version-history":[{"count":1,"href":"https:\/\/www.waseda.jp\/top\/wp-json\/wp\/v2\/posts\/6099\/revisions"}],"predecessor-version":[{"id":63417,"href":"https:\/\/www.waseda.jp\/top\/wp-json\/wp\/v2\/posts\/6099\/revisions\/63417"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.waseda.jp\/top\/wp-json\/wp\/v2\/posts\/6566"}],"wp:attachment":[{"href":"https:\/\/www.waseda.jp\/top\/wp-json\/wp\/v2\/media?parent=6099"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.waseda.jp\/top\/wp-json\/wp\/v2\/categories?post=6099"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.waseda.jp\/top\/wp-json\/wp\/v2\/tags?post=6099"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}