{"id":57561,"date":"2018-03-09T16:00:12","date_gmt":"2018-03-09T07:00:12","guid":{"rendered":"https:\/\/www.waseda.jp\/top\/?p=57561"},"modified":"2018-10-19T14:18:48","modified_gmt":"2018-10-19T05:18:48","slug":"%e3%82%a6%e3%82%a8%e3%83%8f%e3%83%bc%e7%b4%9a%e5%93%81%e8%b3%aa%e3%81%ae%e5%a4%aa%e9%99%bd%e9%9b%bb%e6%b1%a0%e7%94%a8%e3%82%b7%e3%83%aa%e3%82%b3%e3%83%b3%e8%96%84%e8%86%9c%e3%81%ae%e4%bd%9c%e8%a3%bd","status":"publish","type":"post","link":"https:\/\/www.waseda.jp\/inst\/research\/news\/57561","title":{"rendered":"\u30a6\u30a8\u30cf\u30fc\u7d1a\u54c1\u8cea\u306e\u592a\u967d\u96fb\u6c60\u7528\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u306e\u4f5c\u88fd\u306b\u6210\u529f"},"content":{"rendered":"<h2>10\u500d\u4ee5\u4e0a\u306e\u6210\u9577\u901f\u5ea6\u3067\u3001\u88fd\u9020\u30b3\u30b9\u30c8\u306e\u5927\u5e45\u4f4e\u6e1b\u306b\u671f\u5f85<\/h2>\n<h3>\u8981\u70b9<\/h3>\n<ul>\n<li>\u5f93\u6765\u306e10\u500d\u4ee5\u4e0a\u306e\u6210\u9577\u901f\u5ea6\u3067\u592a\u967d\u96fb\u6c60\u7528\u9ad8\u54c1\u8ceaSi\u5358\u7d50\u6676\u8584\u819c\u306e\u5f62\u6210\u306b\u6210\u529f<\/li>\n<li>\u30ca\u30ce\u8868\u9762\u7c97\u3055\u5236\u5fa1\u6280\u8853\u306b\u3088\u308a\u3001\u7d50\u6676\u6b20\u9665\u5bc6\u5ea6\u3092\u30b7\u30ea\u30b3\u30f3\u30a6\u30a8\u30cf\u30fc\u30ec\u30d9\u30eb\u306b\u4f4e\u6e1b<\/li>\n<li>\u5358\u7d50\u6676Si\u592a\u967d\u96fb\u6c60\u306e\u767a\u96fb\u52b9\u7387\u3092\u7dad\u6301\u3057\u3001\u30b3\u30b9\u30c8\u3092\u5927\u5e45\u4f4e\u6e1b\u53ef\u80fd\u306a\u6280\u8853\u3092\u958b\u767a<\/li>\n<\/ul>\n<h3>\u6982\u8981<\/h3>\n<p>\u65e9\u7a32\u7530\u5927\u5b66\u7406\u5de5\u5b66\u8853\u9662\u306e<a href=\"https:\/\/researchers.waseda.jp\/profile\/ja.99cc1c0c980a03842b9bfbfd31b23d3e.html\" target=\"_blank\" rel=\"noopener\">\u91ce\u7530\u512a\u6559\u6388<\/a>\u306f\u3001\u6771\u4eac\u5de5\u696d\u5927\u5b66 \u7269\u8cea\u7406\u5de5\u5b66\u9662 \u5fdc\u7528\u5316\u5b66\u7cfb\u306e\u4f0a\u539f\u5b66\u6559\u6388\u3001\u9577\u8c37\u5ddd\u99a8\u52a9\u6559\u3089\u3068\u5171\u540c\u3067\u3001\u7d50\u6676\u6b20\u9665\u5bc6\u5ea6\u3092\u30b7\u30ea\u30b3\u30f3\uff08Si\uff09\u30a6\u30a8\u30cf\u30fc\u30ec\u30d9\u30eb\u307e\u3067\u4f4e\u6e1b\u3057\u305f\u9ad8\u54c1\u8cea\u5358\u7d50\u6676Si\u8584\u819c\u3092\u3001\u3053\u308c\u307e\u3067\u306e10\u500d\u4ee5\u4e0a\u306e\u6210\u9577\u901f\u5ea6\u3067\u4f5c\u88fd\u3059\u308b\u3053\u3068\u306b\u6210\u529f\u3057\u307e\u3057\u305f\u3002\u539f\u7406\u7684\u306b\u539f\u6599\u53ce\u7387\u3092100%\u8fd1\u304f\u306b\u5411\u4e0a\u3067\u304d\u308b\u305f\u3081\u3001\u5358\u7d50\u6676Si\u592a\u967d\u96fb\u6c60\u306e\u767a\u96fb\u52b9\u7387\u3092\u7dad\u6301\u3057\u305f\u307e\u307e\u3001\u88fd\u9020\u30b3\u30b9\u30c8\u3092\u5927\u5e45\u306b\u4f4e\u6e1b\u3059\u308b\u3053\u3068\u304c\u671f\u5f85\u3067\u304d\u307e\u3059\u3002<br \/>\n\u4f0a\u539f\u6559\u6388\u3089\u306f\u5358\u7d50\u6676\u30a6\u30a8\u30cf\u30fc\u306e\u8868\u9762\u306b\u96fb\u6c17\u5316\u5b66\u7684\u624b\u6cd5\u30672\u5c64\u306e\u30ca\u30ce\u30aa\u30fc\u30c0\u30fc\u306e<strong>\u30dd\u30fc\u30e9\u30b9\u30b7\u30ea\u30b3\u30f3<\/strong>\uff08\u7528\u8a9e\uff11\uff09\u3092\u4f5c\u88fd\u3002\u72ec\u81ea\u306e<strong>\u30be\u30fc\u30f3\u30d2\u30fc\u30c6\u30a3\u30f3\u30b0\u518d\u7d50\u6676\u5316\u6cd5<\/strong>\uff08<strong>ZHR\u6cd5<\/strong>\u3001\u7528\u8a9e\uff12\uff09\u3067\u8868\u9762\u8352\u30550.2-0.3 nm\uff08\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\uff09\u307e\u3067\u5e73\u6ed1\u5316\u3057\u305f\u57fa\u677f\u3092\u4f7f\u3063\u3066\u9ad8\u901f\u6210\u9577\u3055\u305b\u3001\u9ad8\u54c1\u8cea\u306e\u8584\u819c\u5358\u7d50\u6676\u3092\u5f97\u307e\u3057\u305f\u3002\u6210\u9577\u819c\u306f2\u5c64\u306e\u30dd\u30fc\u30e9\u30b9Si\u5c64\u3092\u4f7f\u3063\u3066\u5bb9\u6613\u306b\u5265\u96e2\u3067\u304d\u307e\u3059\u3002ZHR\u6cd5\u306e\u6761\u4ef6\u3092\u5909\u3048\u3066\u4e0b\u5730\u57fa\u677f\u306e\u8868\u9762\u7c97\u3055\u3092\u4f4e\u6e1b\u3059\u308b\u3068\u3001\u7d50\u6676\u8584\u819c\u306e\u6b20\u9665\u5bc6\u5ea6\u304c\u5f90\u3005\u306b\u6e1b\u5c11\u3057\u3001\u6700\u7d42\u7684\u306b\u7d0410\u5206\u306e\uff11\u306eSi\u30a6\u30a8\u30cf\u30fc\u30ec\u30d9\u30eb\u307e\u3067\u4f4e\u6e1b\u3067\u304d\u307e\u3057\u305f\u3002\u308f\u305a\u304b0.1-0.2 nm\uff08\u539f\u5b50\u6570\u301c\u6570\u5341\u5c64\u30ec\u30d9\u30eb\uff09\u306e\u8868\u9762\u8352\u3055\u304c\u7d50\u6676\u6b20\u9665\u306e\u5f62\u6210\u306b\u91cd\u8981\u306a\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u3053\u3068\u3092\u793a\u3057\u305f\u3082\u306e\u3067\u3001\u7d50\u6676\u6210\u9577\u30e1\u30ab\u30cb\u30ba\u30e0\u3068\u3057\u3066\u3082\u8208\u5473\u6df1\u3044\u3082\u306e\u3067\u3059\u3002<br \/>\n\u7814\u7a76\u6210\u679c\u306f\u82f1\u56fd\u738b\u7acb\u5316\u5b66\u4f1a\uff08Royal Society of Chemistry\uff09\u30b8\u30e3\u30fc\u30ca\u30eb\u300c<a href=\"http:\/\/pubs.rsc.org\/en\/content\/articlelanding\/2018\/ce\/c7ce02162c#!divAbstract\" target=\"_blank\" rel=\"noopener\">CrystEngComm\u300d<\/a>\u306b2\u670815\u65e5\u306b\u63b2\u8f09\u3055\u308c\u308b\u3068\u3068\u3082\u306b\u3001\u540c\u8a8c\u306e\u8868\u7d19\u306b\u306a\u308b\u3053\u3068\u304c\u6c7a\u5b9a\u3057\u307e\u3057\u305f\u3002<\/p>\n<h3><strong>\u7814\u7a76\u6210\u679c<\/strong><\/h3>\n<p>\u4f0a\u539f\u6559\u6388\u3089\u306e\u958b\u767a\u3057\u305f\u5358\u7d50\u6676Si\u8584\u819c\u4f5c\u88fd\u6280\u8853\u306f\u539f\u6599\u53ce\u7387\u3092100%\u8fd1\u304f\u307e\u3067\u5411\u4e0a\u3067\u304d\u308b\u3002\u3053\u306e\u305f\u3081\u3001\u73fe\u5728\u3001\u592a\u967d\u96fb\u6c60\u306e\u591a\u6570\u3092\u5360\u3081\u308b\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u592a\u967d\u96fb\u6c60\u4e26\u307f\u306e\u767a\u96fb\u52b9\u7387\u3092\u7dad\u6301\u3057\u305f\u307e\u307e\u3001\u9ad8\u901f\u6210\u9577\u306b\u3088\u308b\u88fd\u9020\u88c5\u7f6e\u30b3\u30b9\u30c8\u304a\u3088\u3073\u8584\u819c\u5316\u30fb\u9ad8\u539f\u6599\u53ce\u7387\u306b\u3088\u308b\u539f\u6599\u30b3\u30b9\u30c8\u3092\u5927\u5e45\u306b\u4f4e\u6e1b\u3067\u304d\u308b\u6280\u8853\u3068\u3057\u3066\u671f\u5f85\u3067\u304d\u308b\u3002<br \/>\n\u5177\u4f53\u7684\u306b\u306f\u2460\u5358\u7d50\u6676Si\u30a6\u30a8\u30cf\u30fc\u8868\u9762\u306b2\u5c64\u306e\u30dd\u30fc\u30e9\u30b9\u30b7\u30ea\u30b3\u30f3\u3092\u4f5c\u88fd\u2461\u8868\u9762\u3092ZHR\u6cd5\u3067\u5e73\u6ed1\u5316\u2462\u305d\u306e\u57fa\u677f\u3092\u4f7f\u3063\u3066\u9ad8\u901f\u6210\u9577\u3055\u305b\u3066Si\u5358\u7d50\u6676\u8584\u819c\u3092\u5f62\u6210\u2463\u30dd\u30fc\u30e9\u30b9Si\u5c64\u3092\u4f7f\u3063\u3066\u5265\u96e2\u2015\u3068\u3044\u3046\u624b\u9806\u3060\u3002\u4e0b\u5730\u306eSi\u57fa\u677f\u306f\u518d\u5229\u7528\u3082\u3057\u304f\u306f\u8584\u819c\u6210\u9577\u7528\u306e\u84b8\u767a\u6e90\u3068\u3057\u3066\u5229\u7528\u3067\u304d\u3001\u539f\u6599\u640d\u5931\u3092\u5927\u5e45\u306b\u4f4e\u6e1b\u3067\u304d\u308b\u3002<\/p>\n<h3><strong>\u80cc\u666f<\/strong><\/h3>\n<p>\u5358\u7d50\u6676Si\u592a\u967d\u96fb\u6c60\u306f\u8584\u578b\u5316\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u73fe\u72b6\u30e2\u30b8\u30e5\u30fc\u30eb\u306e\u7d0440%\u3092\u5360\u3081\u3066\u3044\u308b\u539f\u6599\u30b3\u30b9\u30c8\u3092\u5927\u5e45\u306b\u4f4e\u6e1b\u3067\u304d\u308b\u3002\u307e\u305f\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u5316\u3001\u8efd\u91cf\u5316\u306b\u3088\u308b\u7528\u9014\u306e\u62e1\u5927\u3001\u8a2d\u7f6e\u30b3\u30b9\u30c8\u306e\u4f4e\u6e1b\u3082\u671f\u5f85\u3067\u304d\u308b\u3002\u307e\u305f\u3001\u8fd1\u5e74\u3001\u5316\u5b66\u7684\u6c17\u76f8\u6cd5\uff08CVD\uff09\u3092\u7528\u3044\u305f<strong>\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc<\/strong>\uff08\u7528\u8a9e\uff13\uff09\u3001<strong>\u96fb\u6c17\u5316\u5b66\u7684\u30a8\u30c3\u30c1\u30f3\u30b0<\/strong>\uff08\u7528\u8a9e\uff14\uff09\u306b\u3088\u308b\uff12\u5c64\u306e\u591a\u5b54\u5ea6\u306e\u7570\u306a\u308b\u30ca\u30ce\u69cb\u9020\u3092\u6709\u3059\u308b\u30dd\u30fc\u30e9\u30b9\u30b7\u30ea\u30b3\u30f3\uff08Double Porous Silicon layer: DPSL\uff09\u3092\u7528\u3044\u305f\u30ea\u30d5\u30c8\u30aa\u30d5\uff08\u5265\u96e2\uff09\u306b\u3088\u308b\u5358\u7d50\u6676Si\u8584\u819c\u592a\u967d\u96fb\u6c60\u306f\u5c06\u6765\u3001\u7af6\u4e89\u529b\u3092\u6301\u3064\u3068\u3057\u3066\u6ce8\u76ee\u3055\u308c\u3066\u3044\u308b\u3002<br \/>\n\u30ea\u30d5\u30c8\u30aa\u30d5\u306b\u3088\u308b\u5358\u7d50\u6676Si\u592a\u967d\u96fb\u6c60\u306e\u6280\u8853\u7684\u8ab2\u984c\u306f\u3001\u2460Si\u30a6\u30a8\u30cf\u30fc\u30ec\u30d9\u30eb\u306e\u9ad8\u54c1\u8cea\u306aSi\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u3053\u3068\u2461\u5bb9\u6613\u306b\u30ea\u30d5\u30c8\u30aa\u30d5\u53ef\u80fd\u306a\u30dd\u30fc\u30e9\u30b9\u69cb\u9020\u3092\u6301\u3063\u3066\u3044\u308b\u3053\u3068\u2462\u6210\u9577\u901f\u5ea6\u3068Si\u539f\u6599\u53ce\u7387\u3092\u5927\u5e45\u306b\u5411\u4e0a\u3055\u305b\u308b\u3053\u3068\uff08\u6210\u9577\u901f\u5ea6\u306b\u3088\u3063\u3066\u5fc5\u8981\u306a\u88c5\u7f6e\u30b3\u30b9\u30c8\u304c\u6c7a\u5b9a\uff09\u2463\u30ea\u30d5\u30c8\u30aa\u30d5\u5f8c\u306e\u57fa\u677f\u3092\u7121\u99c4\u306a\u304f\u5229\u7528\u3067\u304d\u308b\u3053\u3068\u2015\u306a\u3069\u3067\u3042\u3063\u305f\u3002\u7279\u306b\u2460\u306e\u30a6\u30a8\u30cf\u30fc\u30ec\u30d9\u30eb\u306e\u54c1\u8cea\u306e\u5b9f\u73fe\u306e\u305f\u3081\u306b\u306f\u3001\u30dd\u30fc\u30e9\u30b9\u30b7\u30ea\u30b3\u30f3\u4e0a\u306b\u6210\u9577\u3059\u308b\u7d50\u6676\u8584\u819c\u306e\u54c1\u8cea\u3092\u652f\u914d\u3059\u308b\u4e3b\u8981\u56e0\u3092\u660e\u3089\u304b\u306b\u3057\u3066\u3001\u5236\u5fa1\u3059\u308b\u6280\u8853\u3092\u958b\u767a\u3059\u308b\u5fc5\u8981\u304c\u3042\u3063\u305f\u3002<\/p>\n<h3><strong>\u7814\u7a76\u306e\u7d4c\u7def<\/strong><\/h3>\n<p>\u6771\u5de5\u5927\u4f0a\u539f\u7814\u7a76\u5ba4\u3067\u306f\u30e9\u30f3\u30d7\u30d2\u30fc\u30bf\u30fc\u306e\u9ad8\u901f\u8d70\u67fb\u306b\u3088\u308a\u819c\u306e\u307f\u3092\u9ad8\u6e29\u71b1\u51e6\u7406\u53ca\u3073\u518d\u7d50\u6676\u5316\u3059\u308b\u624b\u6cd5\u3092\u6709\u3057\u3001\u8868\u9762\u71b1\u5c65\u6b74\u306e\u5236\u5fa1\u306b\u3088\u308b\u9ad8\u7d50\u6676\u5316\u306e\u6280\u8853\u84c4\u7a4d\u3092\u6301\u3064\u3002\u5e2f\u57df\u52a0\u71b1\u306f\u77ed\u6642\u9593\u3067\u306e\u51e6\u7406\u3067\u3042\u308a\u3001\u5927\u9762\u7a4d\u5316\u306b\u3082\u5bfe\u5fdc\u53ef\u80fd\u306a\u624b\u6cd5\u3067\u3042\u308b\u3002\u5e73\u6ed1\u306aSiO<sub>2<\/sub>\u3067\u631f\u307f\u8fbc\u3080\u69cb\u9020\u3092\u4f5c\u308a\u3001\u9ad8\u901f\u306e\u5e2f\u57df\u52a0\u71b1\uff08&lt;10mm\/sec\uff09\u3092\u884c\u3046\u3053\u3068\u3067\u3001\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9Si\u3092\u77ed\u6642\u9593\u3067\u6eb6\u878d\u518d\u7d50\u6676\u5316\u3057\u5358\u7d50\u6676Si\u306e\u751f\u6210\u306b\u3053\u308c\u307e\u3067\u306b\u6210\u529f\u3057\u305f\uff08zone melting crystallization, ZMC\uff09[1]\u3002<br \/>\n\u3053\u306e\u7d50\u6676\u6210\u9577\u3067\u306f\u3001SiO<sub>2<\/sub>\/Si\u306e\u56fa\u6db2\u754c\u9762\u306b\u3066\u5b89\u5b9a\u7d50\u6676\u9762\u304c\u5b58\u5728\u3057\u30e1\u30eb\u30c8\/\u56fa\u5316\u306e\u904e\u7a0b\u306e\u5c40\u6240\u7684\u306a\u5b89\u5b9a\u6027\u306b\u3088\u3063\u3066(100)\u914d\u5411\u3057\u3001\u201c\u9ad8\u901f\u3001\u30b7\u30fc\u30c9\u7121\u3057\u306e\u51e6\u7406\u201d\u3067\u3082\u5358\u7d50\u6676Si\u819c\u306e\u5f62\u6210\u304c\u53ef\u80fd\u3068\u306a\u3063\u305f\u3068\u5831\u544a\u3057\u3066\u3044\u305f [2]\u3002<br \/>\n\u3055\u3089\u306b\u3001\u3053\u308c\u3089\u306e\u6280\u8853\u3092\u30dd\u30fc\u30e9\u30b9\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u306e\u51e6\u7406\u306b\u9069\u7528\u3057\u3001\u51e6\u7406\u6761\u4ef6\u3092\u3088\u308a\u30de\u30a4\u30eb\u30c9\u306b\u3059\u308b\u3053\u3068\u3067\u8868\u9762\u306e\u307f\u306e\u69cb\u9020\u5909\u5316\u3092\u53ef\u80fd\u3068\u3059\u308b\u3001\u30be\u30fc\u30f3\u30d2\u30fc\u30c6\u30a3\u30f3\u30b0\u518d\u7d50\u6676\u5316\u6cd5\uff08ZHR\u6cd5\uff09\u3092\u958b\u767a\u3057\u305f\u3002\u3053\u308c\u306b\u3088\u3063\u3066\u3001\u5bb9\u6613\u306b\u30ea\u30d5\u30c8\u30aa\u30d5\u53ef\u80fd\u306a\u69cb\u9020\u3068\u6210\u9577\u306b\u5fc5\u8981\u306a\u69cb\u9020\u5909\u5316\u306e\u4e21\u7acb\u304c\u53ef\u80fd\u3068\u306a\u3063\u305f[3]\u3002\u3057\u304b\u3057\u3001\u3053\u308c\u3089\u306e\u69cb\u9020\u5909\u5316\u3068\u6210\u9577\u3059\u308bSi\u8584\u819c\u306e\u54c1\u8cea\u3068\u306e\u95a2\u4fc2\u306f\u660e\u304b\u3067\u306f\u306a\u304b\u3063\u305f\u3002<br \/>\n\u307e\u305f\u3001\u5358\u7d50\u6676Si\u8584\u819c\u88fd\u9020\u306b\u304a\u3044\u3066\u30dc\u30c8\u30eb\u30cd\u30c3\u30af\u3068\u306a\u308b\u306e\u304c\u3001\u6210\u819c\u901f\u5ea6\u3068Si\u8584\u819c\u3078\u306eSi\u306e\u539f\u6599\u53ce\u7387\u3067\u3042\u308b\u3002\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u3067\u4e3b\u306b\u7528\u3044\u3089\u308c\u308b\u5316\u5b66\u84b8\u7740(CVD)\u3067\u306f\u88fd\u819c\u901f\u5ea6\u306f\u6700\u5927\u3067\u6bce\u6642\u6570\u00b5m\uff08\u30de\u30a4\u30af\u30ed\u30e1\u30fc\u30c8\u30eb\uff09\u3067\u3042\u308a\u53ce\u7387\u306f10%\u7a0b\u5ea6\u3067\u3042\u308b\u3002\u65e9\u5927\u91ce\u7530\u7814\u7a76\u5ba4\u3067\u306f\u3001\u539f\u6599Si\u3092\u901a\u96fb\u52a0\u71b1\u3067\u84b8\u767a\u3055\u305b\u308b\u7269\u7406\u84b8\u7740(PVD)\u306b\u304a\u3044\u3066\u3001\u539f\u6599\u6e29\u5ea6\u3092Si\u306e\u878d\u70b9(1414 \u00baC)\u3088\u308a\u306f\u308b\u304b\u9ad8\u6e29(2000 \u00baC)\u306b\u3059\u308b\u3053\u3068\u3067\u9ad8\u3044Si\u84b8\u6c17\u5727\u3092\u5f97\u3001\u6bce\u520610 \u00b5m\u3067Si\u3092\u5806\u7a4d\u3067\u304d\u308b\u6025\u901f\u84b8\u7740\u6cd5(rapid vapor deposition\u3001 RVD)\u3092\u958b\u767a\u3057\u305f[4]\u3002<br \/>\n\u4eca\u56de\u306e\u6210\u679c\u306f\u3001ZHR\u306e\u6280\u8853\u306b\u3088\u3063\u3066\u3001\u30ea\u30d5\u30c8\u30aa\u30d5\u6cd5\u306e\u6280\u8853\u8ab2\u984c\u3067\u3042\u308b\u2460Si\u30a6\u30a8\u30cf\u30fc\u30ec\u30d9\u30eb\u306e\u9ad8\u54c1\u8cea\u306aSi\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u3053\u3068\u2461\u5bb9\u6613\u306b\u30ea\u30d5\u30c8\u30aa\u30d5\u53ef\u80fd\u306a\u30dd\u30fc\u30e9\u30b9\u69cb\u9020\u3092\u6301\u3063\u3066\u3044\u308b\u3053\u3068\u2015\u304c\u5b9f\u73fe\u3067\u304d\u305f\u3002\u3055\u3089\u306b\u3001RVD\u6cd5\u306b\u3088\u3063\u3066\u6210\u9577\u901f\u5ea6\u3068Si\u539f\u6599\u53ce\u7387\u3092\u5927\u5e45\u306b\u5411\u4e0a\u3055\u305b\u308b\u3053\u3068\u304c\u53ef\u80fd\u3067\u3042\u308a\u3001\u30ea\u30b9\u30c8\u30aa\u30d5\u5f8c\u306e\u57fa\u677f\u3092RVD\u306e\u84b8\u767a\u6e90\u3068\u3057\u3066\u5229\u7528\u3059\u308c\u3070\u3001\u30ea\u30d5\u30c8\u30aa\u30d5\u5f8c\u306e\u57fa\u677f\u3092\u7121\u99c4\u306a\u304f\u5229\u7528\u3067\u304d\u308b\u3088\u3046\u306b\u306a\u3063\u305f\u3002<br \/>\n[1] M. Ihara, S. Yokoyama, C. Yokoyama, K. Izumi and H. Komiyama, Applied Physics Letters, 79, 3809, (2001).<br \/>\n[2] S. Yokoyama, M. Ihara, K. Izumi, H. Komiyama and C. Yokoyama, Journal of The Electrochemical Society. <strong>150<\/strong>, A594 (2003).<br \/>\n[3] A. Lukianov, K. Murakami, C. Takazawa and M. Ihara, Applied Physics Letters. <strong>108, <\/strong>213904 (2016).<br \/>\n[4] Y. Yamasaki, K. Hasegawa, T. Osawa and S. Noda, CrystEngComm <strong>18<\/strong>, 3404 (2016).<\/p>\n<h3><strong>\u4eca\u5f8c\u306e\u5c55\u958b<\/strong><\/h3>\n<p>\u4eca\u56de\u306e\u6210\u679c\u306b\u3088\u3063\u3066\u3001\u30ea\u30d5\u30c8\u30aa\u30d5\u6cd5\u306b\u7528\u3044\u308b\u30dd\u30fc\u30e9\u30b9\u30b7\u30ea\u30b3\u30f3\u4e0a\u306b\u9ad8\u901f\u6210\u9577\u3055\u305b\u308b\u969b\u306e\u7d50\u6676\u3068\u3057\u3066\u306e\u54c1\u8cea\u5411\u4e0a\u306e\u4e3b\u8981\u56e0\u3092\u660e\u3089\u304b\u306b\u3059\u308b\u3068\u3068\u3082\u306b\u3001\u305d\u306e\u5236\u5fa1\u306b\u6210\u529f\u3057\u305f\u3002\u4eca\u5f8c\u306f\u3001\u3088\u308a\u592a\u967d\u96fb\u6c60\u6027\u80fd\u306b\u76f4\u7d50\u3059\u308b\u8584\u819c\u306e\u30ad\u30e3\u30ea\u30a2\u30e9\u30a4\u30d5\u30bf\u30a4\u30e0\u306e\u6e2c\u5b9a\u304a\u3088\u3073\u3001\u5b9f\u969b\u306b\u592a\u967d\u96fb\u6c60\u3092\u4f5c\u88fd\u3057\u3066\u3001\u6280\u8853\u306e\u5b9f\u7528\u5316\u3092\u76ee\u6307\u3059\u3002\u307e\u305f\u3001\uff13\uff10\uff05\u8d85\u306e\u52b9\u7387\u3092\u6301\u3064\u30bf\u30f3\u30c7\u30e0\u578b\u592a\u967d\u96fb\u6c60\u7528\u306e\u4f4e\u30b3\u30b9\u30c8\u30dc\u30c8\u30e0\u30bb\u30eb\u3068\u3057\u3066\u306e\u5229\u7528\u3082\u691c\u8a0e\u3059\u308b\u3002<br \/>\n<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-57562\" src=\"https:\/\/www.waseda.jp\/top\/assets\/uploads\/2018\/03\/20180309_fig1-610x329.png\" alt=\"\" width=\"610\" height=\"329\" \/><\/p>\n<h3><strong>\u7528\u8a9e\u8aac\u660e<\/strong><\/h3>\n<ol>\n<li>\u30dd\u30fc\u30e9\u30b9\u30b7\u30ea\u30b3\u30f3\uff1a\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30b5\u30a4\u30ba\u306e\u591a\u6570\u306e\u7d30\u5b54\u3092\u6301\u3064\u30b7\u30ea\u30b3\u30f3\u3067\u3001\u96fb\u6c17\u5316\u5b66\u7684\u306a\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u3088\u3063\u3066\u4f5c\u88fd\u3059\u308b\u3002<\/li>\n<li>\u30be\u30fc\u30f3\u30d2\u30fc\u30c6\u30a3\u30f3\u30b0\u518d\u7d50\u6676\u5316\u6cd5\uff08ZHR\u6cd5\uff09\uff1a\u6955\u5186\u72b6\u306e\u30df\u30e9\u30fc\u3092\u4f7f\u3063\u3066\u7dda\u72b6\u306b\u52a0\u71b1\u3057\u306a\u304c\u3089\u8d70\u67fb\u3059\u308b\u3053\u3068\u3067\u3001\u7dda\u72b6\u306e\u8868\u9762\u306e\u307f\u3092\u9806\u6b21\u3001\u518d\u7d50\u6676\u5316\u3055\u305b\u308b\u6280\u8853\u3002<\/li>\n<li>\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\uff1a\u4e0b\u5730\u57fa\u677f\u306e\u7d50\u6676\u69cb\u9020\u3092\u5f15\u304d\u7d99\u3050\u7d50\u6676\u6210\u9577\u3002<\/li>\n<li>\u96fb\u6c17\u5316\u5b66\u7684\u30a8\u30c3\u30c1\u30f3\u30b0\uff1a\u96fb\u5727\u3092\u304b\u3051\u3066\u96fb\u6c17\u5316\u5b66\u7684\u306b\u9178\u5316\u3059\u308b\u3053\u3068\u3067\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u304a\u3053\u306a\u3046\u6280\u8853\u3002<\/li>\n<\/ol>\n<h3><strong>\u8ad6\u6587\u60c5\u5831<\/strong><\/h3>\n<ul>\n<li>\u63b2\u8f09\u8a8c\uff1aCrystEngComm (RSC), 2018<\/li>\n<li>\u30bf\u30a4\u30c8\u30eb\uff1a\u201c<a href=\"http:\/\/pubs.rsc.org\/en\/content\/articlelanding\/2018\/ce\/c7ce02162c#!divAbstract\" target=\"_blank\" rel=\"noopener\">Critical effect of nanometer-size surface roughness of a porous Si seed layer on defect density of epitaxial Si films for solar cells by rapid vapor deposition<\/a>\u201d<\/li>\n<li>\u8457\u8005\uff1aKei Hasegawa, Chiaki Takazawa, Makoto Fujita, Suguru Noda, Manabu Ihara<\/li>\n<li>DOI: 10.1039\/C7CE02162C<\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"<p>10\u500d\u4ee5\u4e0a\u306e\u6210\u9577\u901f\u5ea6\u3067\u3001\u88fd\u9020\u30b3\u30b9\u30c8\u306e\u5927\u5e45\u4f4e\u6e1b\u306b\u671f\u5f85 \u8981\u70b9 \u5f93\u6765\u306e10\u500d\u4ee5\u4e0a\u306e\u6210\u9577\u901f\u5ea6\u3067\u592a\u967d\u96fb\u6c60\u7528\u9ad8\u54c1\u8ceaSi\u5358\u7d50\u6676\u8584\u819c\u306e\u5f62\u6210\u306b\u6210\u529f \u30ca\u30ce\u8868\u9762\u7c97\u3055\u5236\u5fa1\u6280\u8853\u306b\u3088\u308a\u3001\u7d50\u6676\u6b20\u9665\u5bc6\u5ea6\u3092\u30b7\u30ea\u30b3\u30f3\u30a6\u30a8\u30cf\u30fc\u30ec\u30d9\u30eb\u306b\u4f4e\u6e1b \u5358\u7d50\u6676Si\u592a\u967d\u96fb\u6c60 [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":66392,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[1],"tags":[145,178],"class_list":["post-57561","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news","tag-pressrelease","tag-research"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.waseda.jp\/inst\/research\/wp-json\/wp\/v2\/posts\/57561","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.waseda.jp\/inst\/research\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.waseda.jp\/inst\/research\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.waseda.jp\/inst\/research\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.waseda.jp\/inst\/research\/wp-json\/wp\/v2\/comments?post=57561"}],"version-history":[{"count":2,"href":"https:\/\/www.waseda.jp\/inst\/research\/wp-json\/wp\/v2\/posts\/57561\/revisions"}],"predecessor-version":[{"id":66396,"href":"https:\/\/www.waseda.jp\/inst\/research\/wp-json\/wp\/v2\/posts\/57561\/revisions\/66396"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.waseda.jp\/inst\/research\/wp-json\/wp\/v2\/media\/66392"}],"wp:attachment":[{"href":"https:\/\/www.waseda.jp\/inst\/research\/wp-json\/wp\/v2\/media?parent=57561"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.waseda.jp\/inst\/research\/wp-json\/wp\/v2\/categories?post=57561"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.waseda.jp\/inst\/research\/wp-json\/wp\/v2\/tags?post=57561"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}