Hiroshi　KAWARADA

TEL :03-5286-3391 　 FAX :03-5286-3391
e-mail :kawarada@waseda.jp
URL:http://www.kawarada-lab.com

1985, Doctor of Engineering, Graduate School of Science and Engineering, Waseda University.
1986-1990, Assistant Professor, Faculty of Engineering, Osaka University.
1990-1995, Associate Professor, School of Science and Engineering, Waseda University.
1995- present, Professor, School of Science and Engineering, Waseda University.

Research

Carbon nanoelectronics
Due to its extreme properties, diamond and carbon nanotube are expected to be applied in the ultimate semiconductor devices in high power, high frequency operation and highly integration. In diamond, we focused on surface accumulation layer appearing on a hydrogen terminated diamond surface and developed surface channel field effect transistors (FETs). This type of FET is applicable in high-frequency devices operating at high power, in-plane-gate FETs for nanoelectronics,and biosensors in electrolyte solution. We are also investigating carbon nanotube for the multi layer interconnection for the next generation ULSI.
Research Subjects
In research, we worked on nanoelectronics from RF & power devices, superconductor devices, biosensors,bioelectronics and ULSI fabrication process based on nanocarbon electronics.
The work covers the following area:
—Microwave devices and their characteristics using diamond MOSFET. fT 45 GHz, fmax 100GHz are obtained with a power handling capability exceeding those of Si or GaAs transistors. Presented in IEEE IEDM pp. 873 (2007)
—Biosensor & bioelectronics using surface modification. Diamond solution gate FETs for Biosensing DNA detection to detect single base mismatch. Published in Phys.Rev.E. 74, 041919 (2006), and J. Am. Chem. Soc. 130 (2008)
—Carbon nanotubes grown at low temperature compatible with Si ULSI fabrication. With densely packed & vertically oriented single or double wall carbon nanotube for interconnection and super capacitor. Published in Nano Letters, 8.886 (2008).
—Diamond superconductivity using highly B-doped (1021cm–3) diamond. Tc~10K enables cryoelectronics application. Published in Nature, 438, 647-650 (2005) and Phys. Rev. Lett. 97, 097002 (2006).

Representative publications

[1] A. Kawano, H. Ishiwata, S.Iriyama, R. Okada, T. Yamaguchi, Y.Takano, and H. Kawarada "Superconductor-to-insulator transition in boron-doped diamond films grown using chemical vapor deposition" Phys. Rev. B Vol. 82, 085318(2010)
[2] K.Tsugawa, H. Noda, K. Hirose, and H. Kawarada "Schottky barrier heights, carrier density, and negative electron affinity of hydrogen-terminated diamond" Phys. Rev. B Vol. 81 045303 (2010)
[3] Y.Jingu, K. Hirama, and H. Kawarada "Ultrashallow TiC Source/Drain Contacts in Diamond MOSFETs Formed by Hydrogenation-Last Approach" IEEE TRANSACTION ON Electron Devices Vol. 57, No.5 966-972 (2010)
[4] S.Kuga, H. Kawarada et al., “Detection of mismatched DNA on partially negatively charged diamond surface by optical and potentiometric methods”, J. Am. Chem. Soc., 130,13251 (2008).
[5] T.Iwasaki, J.Robertson, H.Kawarada, “Mechanism Analysis of Interrupted Growth of Single-Walled Carbon Nanotube Arrays”, Nano Letters, 8. 886 (2008).
[6] K.Hirama, H.Kawarada et al., “High performance p-channel diamond MOSFETs with alumina gate insulator”, IEEE IEDM p.873 (2007).
[7] G. F. Zhong, T. Iwasaki, J. Robertson, H. Kawarada "Growth Kinetics of 0.5 cm Vertically Aligned Single-Walled Carbon Nanotubes", J. Phys. Chem. B, 111, 8, 1907-1910 (2007)
[8] K. Ishizaka, R. Eguchi, S. Tsuda, T. Yokoya, A. Chainani, T. Kiss, T. Shimojima, T. Togashi, S. Watanabe, CT. Chen, CQ. Zhang, Y. Takano, M. Nagao, I. Sakaguchi, T. Takenouchi, H. Kawarada, S. Shin "Observation of a superconducting gap in boron-doped diamond by laser-excited photoemission spectroscopy", Phys. Rev. Lett., 98, 4, 047003 (2007)
[9] D. Yokoyama, H. Kawarada et al., “Low temperature grown carbon nanotube interconnects using inner shells by chemical mechanical polishing”, Appl. Phys. Lett., 91, 26, 263101 (2007).
[10]G. F. Zhong, T. Iwasaki, H. Kawarada "Semi-quantitative study on the fabrication of densely packed and vertically aligned single-walled carbon nanotubes", Carbon, 44, 10, 2009-2014 (2006)
[11]G. J. Zhang, K. S. Song, Y. Nakamura, T. Funatsu, I. Ohdomari, H. Kawarada "DNA Micropatterning on Polycrystalline Diamond via One?Step Direct Amination", Langmuir, 22, 3728-3734 (2006)
[12] K. S. Song, H. Kawarada et al., “Label-free DNA sensors using diamond FETs”, Phys. Rev. E, 74, 041919 (2006).
[13] T. Yokoya, H.Kawarada, et al., “Origin of the metallic properties of heavily boron-doped superconducting diamond”, Nature, 438, 647-650 (2005).